发明名称 Process for preparing a metal film on a substrate
摘要 The invention provides a process for preparing a metal film on a substrate, comprising the steps of: (a) depositing a film of a metal oxide on a substrate by means of a gas phase deposition process, which metal is selected from the group consisting of Mo, V, W, Pd, Ru, Ta, Nb and Cr; and (b) reducing the metal oxide on the substrate into the corresponding metal by contacting the film of the metal oxide with a reducing gas at a temperature in the range of from 300 to 1500°C. The invention further provides a substrate onto which a metal film is applied, which metal film is obtainable by the process according to the invention, and a solar cell comprising such a substrate.
申请公布号 EP1691421(A1) 申请公布日期 2006.08.16
申请号 EP20050075331 申请日期 2005.02.10
申请人 NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO 发明人 ZIJP, JOHANNES PETRUS;LINDEN, JOANNES LEONARD
分类号 H01L31/0224;C23C14/08;C23C14/14;C23C14/58;C23C16/06;C23C16/40;C23C16/56 主分类号 H01L31/0224
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