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摘要
申请公布号
EP0825647(B1)
申请公布日期
2006.08.16
申请号
EP19970114396
申请日期
1997.08.20
申请人
NEC CORPORATION
发明人
INOUE, TATSUO
分类号
H01L21/60;H01L23/498;H01L23/32;H01L23/495;H01L23/58
主分类号
H01L21/60
代理机构
代理人
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