Single source precursors for atomic layer deposition,申请号GB20060013453-传众专利搜索

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发明名称	Single source precursors for atomic layer deposition
摘要
申请公布号	GB0613453(D0)	申请公布日期	2006.08.16
申请号	GB20060013453	申请日期	2006.07.06
申请人	EPICHEM LIMITED	发明人
分类号		主分类号
代理机构		代理人
主权项
地址

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