| 摘要 |
<p>A method is provided of estimating an in-focus position of a target in an image scanning apparatus. A first part of the target is scanned at a nominal focus level so as to obtain corresponding image information. One or more further parts of the target are scanned at one or more respective further focus levels so as to obtain corresponding image information. A focus parameter is then calculated for each of the nominal and the one or more further focus levels using the respective image information. An in-focus position common to each of the first and further parts of the target is then estimated using the calculated focus parameters. Corresponding apparatus for performing the method is also provided.</p> |
