发明名称 |
Architecture of a reflective spatial light modulator |
摘要 |
A micro-mirror array fabricated on one substrate is bonded to a second substrate that includes addressing electrodes and control circuitry. In one embodiment, the micro mirror array is fabricated from a substrate that is a single crystal material. There is enough area beneath the micro mirror array for electrodes and control circuitry, including memory buffers and a pulse width modulation array to be fabricated on the second substrate.
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申请公布号 |
US7092140(B2) |
申请公布日期 |
2006.08.15 |
申请号 |
US20040756972 |
申请日期 |
2004.01.13 |
申请人 |
MIRADIA INC. |
发明人 |
PAN SHAOHER X;YANG XIAO;CHEN DONGMIN;ZHANG SHOUCHENG |
分类号 |
G02B26/00;G09G5/00;G02B26/08;G05D25/02;G09G3/20;G09G3/34 |
主分类号 |
G02B26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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