VERFAHREN ZUR REINIGUNG VON CVD-EINRICHTUNGEN UND REINIGUNGSGERÄT DAFÜR,申请号AT20020705296T-传众专利搜索

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发明名称	VERFAHREN ZUR REINIGUNG VON CVD-EINRICHTUNGEN UND REINIGUNGSGERÄT DAFÜR
摘要
申请公布号	AT335285(T)	申请公布日期	2006.08.15
申请号	AT20020705296T	申请日期	2002.03.18
申请人	CANON ANELVA CORPORATION;ULVAC, INC.;KANTO DENKA KOGYO CO., LTD.;SANYO ELECTRIC CO., LTD.;SONY CORPORATION;DAIKIN INDUSTRIES, LTD.;TOKYO ELECTRON LIMITED;NEC ELECTRONICS CORPORATION;HITACHI KOKUSAI ELECTRIC INC.;MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.;MITSUBISHI DENKI KABUSHIKI KAISHA;RENESAS TECHNOLOGY CORP.	发明人	SHIBATA, KOJI;TSUJI, NAOTO;MURATA, HITOSHI;WANI, ETSUO;KOSANO, YOSHIHIDE
分类号	H05H1/46;B01J19/08;C23C16/44;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):H01L21/31;H01L21/306	主分类号	H05H1/46
代理机构		代理人
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