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发明名称
VERFAHREN ZUM ERZEUGEN EINES BILDES UNTER VERWENDUNG VON EINER ANTIREFLEXUNTERSCHICHTZUSAMMENSETZUNG
摘要
申请公布号
AT334429(T)
申请公布日期
2006.08.15
申请号
AT20030704352T
申请日期
2003.01.03
申请人
AZ ELECTRONIC MATERIALS USA CORP.
发明人
NEISSER, MARK, O.;OBERLANDER, JOSEPH, E.;TOUKHY, MEDHAT, A.;SAKAMURI, RAJ;DING-LEE, SHUJI
分类号
G03F7/11;G03F7/039;G03F7/09;G03F7/095;G03F7/32;H01L21/027;(IPC1-7):G03F7/09
主分类号
G03F7/11
代理机构
代理人
主权项
地址
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