发明名称 Semiconductor device
摘要 A semiconductor device with high turn off capability includes a plurality of stripe trench lines which are provided in each of adjacent cell regions of a semiconductor layer in parallel and extended from one cell region toward the other cell region, a gate insulating film formed in each of the trench lines, and a gate electrode embedded in each of the trench lines with the gate insulating film interposed therebetween. In this semiconductor device, in each of the cell regions, part of adjacent ends of the plurality of trench lines on a side of the other cell region are connected to each other by connecting portions, and portions between the remaining adjacent ends are open. Moreover, at least one of the connecting portions of one cell region faces one of the open portions of the other cell region.
申请公布号 US7091554(B2) 申请公布日期 2006.08.15
申请号 US20030740676 申请日期 2003.12.22
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 MURAOKA HIROKI;NAKANISHI HIDETOSHI;TSUNODA TETSUJIRO;UMEKAWA SHINICHI
分类号 H01L29/76;H01L29/78;H01L21/331;H01L23/62;H01L29/08;H01L29/10;H01L29/423;H01L29/739;H01L29/94 主分类号 H01L29/76
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