发明名称 Gate and CMOS structure and MOS structure
摘要 Provided are a novel gate, a CMOS structure, and a MOS structure each of that has low resistance and excellent controllability. The gate is comprised of an intermetallic compound semiconductor that has an electric conductivity in a range of no less than 10<SUP>2 </SUP>S.m<SUP>-1</SUP>, nor more than 10<SUP>5 </SUP>S.m<SUP>-1 </SUP>without impurities and has a band structure like that of a semiconductor.
申请公布号 US7091569(B2) 申请公布日期 2006.08.15
申请号 US20040469307 申请日期 2004.01.13
申请人 NATIONAL INSTITUTE FOR MATERIALS SCIENCE 发明人 CHIKYO TOYOHIRO;IMAI MOTOHARU
分类号 H01L29/76;H01L21/28;H01L21/8238;H01L27/092;H01L29/49 主分类号 H01L29/76
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