发明名称 |
Gate and CMOS structure and MOS structure |
摘要 |
Provided are a novel gate, a CMOS structure, and a MOS structure each of that has low resistance and excellent controllability. The gate is comprised of an intermetallic compound semiconductor that has an electric conductivity in a range of no less than 10<SUP>2 </SUP>S.m<SUP>-1</SUP>, nor more than 10<SUP>5 </SUP>S.m<SUP>-1 </SUP>without impurities and has a band structure like that of a semiconductor.
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申请公布号 |
US7091569(B2) |
申请公布日期 |
2006.08.15 |
申请号 |
US20040469307 |
申请日期 |
2004.01.13 |
申请人 |
NATIONAL INSTITUTE FOR MATERIALS SCIENCE |
发明人 |
CHIKYO TOYOHIRO;IMAI MOTOHARU |
分类号 |
H01L29/76;H01L21/28;H01L21/8238;H01L27/092;H01L29/49 |
主分类号 |
H01L29/76 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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