发明名称 Deposition of integrated circuit fabrication materials using a print head
摘要 In one embodiment, an integrated circuit (IC) fabrication material is dispensed from a print head by dividing its nozzles into several groups, and sequentially allowing each group to fire. The nozzles may be grouped based on the amounts of material they dispense. For example, the nozzles may be grouped by drop volume or drop mass. In one embodiment, an IC fabrication material is dispensed on a substrate by controlling a firing sequence of a nozzle to promote merging of material on the substrate. The firing sequence may also be altered to take into account the firing sequence of adjacent nozzles.
申请公布号 US7091134(B1) 申请公布日期 2006.08.15
申请号 US20030464279 申请日期 2003.06.17
申请人 NOVELLUS SYSTEMS, INC. 发明人 MEINHOLD HENNER W.;CAI WAYNE;REA MARK L.;CHINCHWADKAR SACHIN M.
分类号 H01L21/31 主分类号 H01L21/31
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