发明名称 |
Inspection system for active matrix panel, inspection method for active matrix panel and manufacturing method for active matrix OLED panel |
摘要 |
An inspection system for inspecting characteristics of an active matrix panel before formation of OLEDs includes: a roller contact probe having a conductive material on at least a surface thereof and sequentially contacting pixel electrodes formed on the active matrix panel while rotating; probe control circuits having capability to apply a voltage necessary for measurement to TFT arrays including pixel electrodes with which the roller contact probe is in contact; and a computer measuring currents flowing through the TFT arrays to which a voltage is applied and statistically processing the measurement results.
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申请公布号 |
US7091738(B2) |
申请公布日期 |
2006.08.15 |
申请号 |
US20040902752 |
申请日期 |
2004.07.29 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
NAKANO DALJU;SAKAGUCHI YOSHITAMI |
分类号 |
G01R31/00;H02J7/10 |
主分类号 |
G01R31/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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