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发明名称
METHOD FOR FORMING INTERCONNECTION METAL LAYER, METHOD FOR SELECTIVELY FORMING METAL
摘要
申请公布号
KR100613018(B1)
申请公布日期
2006.08.14
申请号
KR20047014418
申请日期
2003.03.07
申请人
发明人
分类号
H01L21/28;C23C16/04;C23C16/18;C23C16/44;C23C16/455;C23C18/18;H01L21/205;H01L21/285;H01L21/48
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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