COMPOSITION FOR ORGANIC BOTTOM ANTI-REFLECTIVE COATING AND METHOD FOR PATTERN FORMATION USING THE SAME,申请号KR20030078454-传众专利搜索

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发明名称	COMPOSITION FOR ORGANIC BOTTOM ANTI-REFLECTIVE COATING AND METHOD FOR PATTERN FORMATION USING THE SAME
摘要
申请公布号	KR100611392(B1)	申请公布日期	2006.08.11
申请号	KR20030078454	申请日期	2003.11.06
申请人		发明人
分类号	G03F7/004	主分类号	G03F7/004
代理机构		代理人
主权项
地址

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