| 发明名称 |
PROCEDE D'OBTURATION D'UN EVENT ET MACHINE METTANT EN OEUVRE UN TEL PROCEDE |
| 摘要 |
The inventive method for closing a vent ( 9 ) formed in a microstructure ( 3 ) wall ( 10 ) under a controlled atmosphere is carried out by an ultrasonic bonding machine comprising a welding electrode ( 14 ), a metal wire ( 13 ) crossing the electrode ( 14 ) and a working table ( 15 ). A ball ( 12 ) is formed by melting on the end part of the metal wire ( 13 ) and is deposited on the end of the vent ( 9 ) and a holding plug ( 11 ) and is subsequently exposed to compression forces (F) and ultrasonic vibration (F<SUB>us</SUB>) by the electrode ( 14 ) in a controlled atmosphere chamber ( 17 ). |
| 申请公布号 |
FR2870227(B1) |
申请公布日期 |
2006.08.11 |
| 申请号 |
FR20040005128 |
申请日期 |
2004.05.12 |
| 申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE ETABLISSEMENT DE CARACTERE SCIENTIFIQUE TECHNIQUE ET INDUSTRIEL |
发明人 |
BLANC HENRI;CAPLET STEPHANE |
| 分类号 |
B81C1/00;B23K20/10;B81B7/00;H01L21/00;H01L21/56;H01L23/18 |
主分类号 |
B81C1/00 |
| 代理机构 |
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