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发明名称
COMPOSITION FOR ORGANIC BOTTOM ANTI-REFLECTIVE COATING AND METHOD FOR PATTERN FORMATION USING THE SAME
摘要
申请公布号
KR100611391(B1)
申请公布日期
2006.08.11
申请号
KR20030078453
申请日期
2003.11.06
申请人
发明人
分类号
G03F7/004;G03C1/76;G03F7/038;G03F7/09
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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