| 摘要 |
PROBLEM TO BE SOLVED: To measure an object which has a part differing in reflection factor without taking time. SOLUTION: Imaging magnification is adjusted by moving one imaging lens along the optical axis and an imaging area 41r and an imaging area 42r are directed by rotating one imaging device. Further, a head pixel px1 of the imaging area 41r or imaging area 42r is shifted by the center shifts (x) and (y) between the imaging area 41r and imaging area 42r to adjust the center of the imaging area 41r and the center of the imaging area 42r to each other. COPYRIGHT: (C)2006,JPO&NCIPI
|
