发明名称 Baffle configurations for molecular drag vacuum pumps
摘要 A molecular drag compressor includes a rotor disk coupled to a drive shaft for rotation about an axis, a stator disposed about the rotor disk, the stator defining a tangential flow channel, an inlet to the tangential flow channel and an outlet from the tangential flow channel, and a stationary baffle disposed in the tangential flow channel adjacent to the outlet. The baffle and the rotor disk have a gap between them. A surface of the baffle facing the rotor disk has cavities configured to produce turbulent gas flow through the gap between the baffle and the rotor disk and to thereby reduce leakage.
申请公布号 US2006177300(A1) 申请公布日期 2006.08.10
申请号 US20050053560 申请日期 2005.02.08
申请人 VARIAN, INC. 发明人 HABLANIAN MARSBED
分类号 F01D1/36 主分类号 F01D1/36
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