| 摘要 |
An acceleration sensor includes a sensor chip having a substrate, a movable electrode supported with respect to the substrate to have a displacement in a direction of acceleration, and a fixed electrode facing the movable electrode with a detection gap. The sensor chip is mounted on a package through an adhesive member. The adhesive member is disposed in such a manner that the disposed area is larger in a direction perpendicular to the acceleration direction than in the acceleration direction. Such a layout of the adhesive member prevents the substrate of the sensor chip from being warped in the acceleration direction by thermal stress. Therefore, the detection gap hardly varies with temperature.
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