| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a VHF electrode suppressing arc discharge and having improved etching uniformity. <P>SOLUTION: A stepwise gas shower head electrode 3240 includes a gas supply manifold 3220 for receiving process gas by a supply pressure on the top of an electrode and a plurality of pressure drop cylindrical orifices 3222, extending from a gas supply manifold 3220 to an electrode 3240 in the axial direction, in one end portion of each orifice. A radial gas distribution manifold 3220 in the electrode extends in the radial direction in the entire region of the electrode. In a plurality of gas flow passages of high conductance, extending in the axial direction, each facing end portion of the plurality of pressure drop orifices 3222 is connected to the radial gas distribution manifold 3220. The plurality of cylindrical gas outlet holes 3214 and 3216 of high conductance are formed on the bottom surface facing the plasma of the electrode 3240, and extend in the axial direction, with respect to the radial gas distribution manifold 3220. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
