发明名称 |
Compound used to form a self-assembled monolayer, layer structure, semiconductor component having a layer structure, and method for producing a layer structure |
摘要 |
Embodiments of the invention provide a semiconductor component and a method of manufacture thereof. A semiconductor component comprises: a gate electrode layer adjacent a substrate, and a gate dielectric layer adjacent the gate electrode layer. The gate dielectric layer comprises a monolayer of at least one compound, wherein the compound has an aromatic or a condensed aromatic molecular group. The molecular group is capable of pi-pi interactions, which stabilize the monolayer. In an embodiment, the semiconductor component is an organic field effect transistor (OFET). In an embodiment of the invention, a method includes forming the monolayer using a liquid phase immersion process.
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申请公布号 |
US2006175603(A1) |
申请公布日期 |
2006.08.10 |
申请号 |
US20050313250 |
申请日期 |
2005.12.20 |
申请人 |
SCHMID GUENTER;HALIK MARCUS;KLAUK HAGEN;ZSCHIESCHANG UTE;EFFENBERGER FRANZ;SCHUETZ MARKUS;MAISCH STEFFEN;SEIFRITZ STEFFEN;BUCKEL FRANK |
发明人 |
SCHMID GUENTER;HALIK MARCUS;KLAUK HAGEN;ZSCHIESCHANG UTE;EFFENBERGER FRANZ;SCHUETZ MARKUS;MAISCH STEFFEN;SEIFRITZ STEFFEN;BUCKEL FRANK |
分类号 |
H01L29/08;B05D1/18;C03C17/30;C03C17/38;C07F7/12;C07F7/18;G03F7/00;G03F7/004;G03F7/16;H01L21/00;H01L51/30 |
主分类号 |
H01L29/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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