发明名称 Compound used to form a self-assembled monolayer, layer structure, semiconductor component having a layer structure, and method for producing a layer structure
摘要 Embodiments of the invention provide a semiconductor component and a method of manufacture thereof. A semiconductor component comprises: a gate electrode layer adjacent a substrate, and a gate dielectric layer adjacent the gate electrode layer. The gate dielectric layer comprises a monolayer of at least one compound, wherein the compound has an aromatic or a condensed aromatic molecular group. The molecular group is capable of pi-pi interactions, which stabilize the monolayer. In an embodiment, the semiconductor component is an organic field effect transistor (OFET). In an embodiment of the invention, a method includes forming the monolayer using a liquid phase immersion process.
申请公布号 US2006175603(A1) 申请公布日期 2006.08.10
申请号 US20050313250 申请日期 2005.12.20
申请人 SCHMID GUENTER;HALIK MARCUS;KLAUK HAGEN;ZSCHIESCHANG UTE;EFFENBERGER FRANZ;SCHUETZ MARKUS;MAISCH STEFFEN;SEIFRITZ STEFFEN;BUCKEL FRANK 发明人 SCHMID GUENTER;HALIK MARCUS;KLAUK HAGEN;ZSCHIESCHANG UTE;EFFENBERGER FRANZ;SCHUETZ MARKUS;MAISCH STEFFEN;SEIFRITZ STEFFEN;BUCKEL FRANK
分类号 H01L29/08;B05D1/18;C03C17/30;C03C17/38;C07F7/12;C07F7/18;G03F7/00;G03F7/004;G03F7/16;H01L21/00;H01L51/30 主分类号 H01L29/08
代理机构 代理人
主权项
地址