发明名称 |
ACCURATELY DISPLACING DEVICE |
摘要 |
The invention relates to precise instrument engineering and can be used in the form of a reference for determining object displacements and linear dimensions within a nanometre range. The inventive accurately displacing device comprises a plate, preferably monocrystal, made of a piezoelectrical material, exhibiting a low-hysteresis effect and provided with electrodes for connecting to a power supply which are applied to the two opposite sides thereof. Said plate can be provided with a crystallographic axes orientation which modifies the sizes thereof in a direction parallel to the plane of the electrodes when a voltage is supllied thereto, or with a crystallographic axes orientation which modifies the sizes of the plate in a direction perpendiculat to the plane of the elctrodes when a voltage is supllied thereto. The top electrode can be provided with a protective layer made, for example, from a diamond-like film or sapphire. |
申请公布号 |
WO2006083191(A1) |
申请公布日期 |
2006.08.10 |
申请号 |
WO2005RU00417 |
申请日期 |
2005.08.15 |
申请人 |
LUSKINOVICH, PETR NIKOLAEVICH;ZHABOTINSKY, VLADIMIR ALEXANDROVICH;BEREZOVSKY, VYACHESLAV NIKOLAEVICH;MAXIMOV, ALEXEI LEONIDOVICH |
发明人 |
LUSKINOVICH, PETR NIKOLAEVICH;ZHABOTINSKY, VLADIMIR ALEXANDROVICH;BEREZOVSKY, VYACHESLAV NIKOLAEVICH;MAXIMOV, ALEXEI LEONIDOVICH |
分类号 |
G01Q40/02;H01L41/09;H02N2/02 |
主分类号 |
G01Q40/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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