发明名称 ACCURATELY DISPLACING DEVICE
摘要 The invention relates to precise instrument engineering and can be used in the form of a reference for determining object displacements and linear dimensions within a nanometre range. The inventive accurately displacing device comprises a plate, preferably monocrystal, made of a piezoelectrical material, exhibiting a low-hysteresis effect and provided with electrodes for connecting to a power supply which are applied to the two opposite sides thereof. Said plate can be provided with a crystallographic axes orientation which modifies the sizes thereof in a direction parallel to the plane of the electrodes when a voltage is supllied thereto, or with a crystallographic axes orientation which modifies the sizes of the plate in a direction perpendiculat to the plane of the elctrodes when a voltage is supllied thereto. The top electrode can be provided with a protective layer made, for example, from a diamond-like film or sapphire.
申请公布号 WO2006083191(A1) 申请公布日期 2006.08.10
申请号 WO2005RU00417 申请日期 2005.08.15
申请人 LUSKINOVICH, PETR NIKOLAEVICH;ZHABOTINSKY, VLADIMIR ALEXANDROVICH;BEREZOVSKY, VYACHESLAV NIKOLAEVICH;MAXIMOV, ALEXEI LEONIDOVICH 发明人 LUSKINOVICH, PETR NIKOLAEVICH;ZHABOTINSKY, VLADIMIR ALEXANDROVICH;BEREZOVSKY, VYACHESLAV NIKOLAEVICH;MAXIMOV, ALEXEI LEONIDOVICH
分类号 G01Q40/02;H01L41/09;H02N2/02 主分类号 G01Q40/02
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