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发明名称
Gate-Bearbeitungsverfahren mit reduzierter Gateoxid Ecken- und Kantenverdünnung
摘要
申请公布号
DE10244569(B4)
申请公布日期
2006.08.10
申请号
DE20021044569
申请日期
2002.09.25
申请人
INFINEON TECHNOLOGIES AG;INTERNATIONAL BUSINESS MACHINES CORP.
发明人
GLUSCHENKOV, OLEG;TEWS, HELMUT;WEYBRIGHT, MARY
分类号
H01L21/336;H01L21/28;H01L21/762;H01L21/8234;H01L29/423;H01L29/51
主分类号
H01L21/336
代理机构
代理人
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