EQUIVALENT-CAPACITANCE TYPE ACTUATOR DRIVE DEVICE

摘要

[PROBLEMS] To provide an electrostatic actuator drive device not requiring a high-voltage amplifier. [MEANS FOR SOLVING PROBLEMS] The electrostatic actuator drive device includes a variable capacitor (12) connected in series to an electrostatic actuator (10) and a constant voltage source (11) for applying a constant voltage to both ends of the electrostatic actuator (10) and the variable capacitor (12) which care connected in series. The electrostatic capacitance of the variable capacitor (12) is varied by control of a controller (14) so as to adjust the voltage applied to the electrostatic actuator (10). The constant voltage source (11) used in this device may any which can generate a constant high voltage. The electrostatic actuator (10) is equivalent to a capacitor. In this device, the electrostatic capacitance of one of the two capacitors connected in series is changed so as to adjust the voltage applied to the electrostatic actuator (10) which is the other capacitor. This drive device can rapidly control the voltage applied to the electrostatic actuator (10) with simple structure without using an expensive high voltage amplifier.