| 摘要 |
PROBLEM TO BE SOLVED: To form a uniform high-quality film without causing quality degradation. SOLUTION: The film is formed on a film forming region A surrounded by a seal portion S on a substrate 20 by discharging a liquid substance. The liquid substance is applied to a region more inside than the seal portion S with an area≥1.3 times of an area of the film forming region A. COPYRIGHT: (C)2006,JPO&NCIPI |
