| 摘要 |
PROBLEM TO BE SOLVED: To provide the structure of a semiconductor optical element which can vividly and easily observe a diffraction grating profile which affects the element characteristics, and to provide its manufacturing method. SOLUTION: A region which does not form a semiconductor mesa is provided between an element back end surface and semiconductor mesas, by utilizing the property where the semiconductor mesa is cleaved easily in the direction of optical waveguide, along the neck part of the semiconductor mesa sidewall formed in embedding growth. COPYRIGHT: (C)2006,JPO&NCIPI
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