| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method capable of manufacturing simply and with good productivity silicon fine particle and titanium oxide fine particle which can be preferably used in a light receiving element, a light emitting element or the like. SOLUTION: The manufacturing method of silicon fine particle comprises dissociating silicon from a silicon hydride by bringing a raw material gas containing the silicon hydride into contact with a heated catalyst comprising either one of tungsten, tantalum, carbon, molybdenum and titanium or a compound thereof, and at the same time aggregating the dissociated silicon by raising the pressure of the raw material gas to high pressure capable of aggregating the dissociated silicon to form silicon fine particle. Whereby the aggregation of silicon is promoted and silicon fine particle is efficiently formed. COPYRIGHT: (C)2006,JPO&NCIPI
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