| 摘要 |
PROBLEM TO BE SOLVED: To provide a plate glass carrying device enabling a precise defect discrimination inspection without producing vibration and oscillation. SOLUTION: This plate glass carrying device comprises a work table 10 having a carrying part 20 and a carrier 30 for carrying a plate glass 40. The carrying part 20 comprises a fan housing 21 covered by a clean filter 21d on its upper side and having a discharge fan 21a therein, an air chamber 22 placed on the upper surface of the fan housing 21, having a through hole 22a formed in the bottom face thereof, having a space part 22b therein, and opened upward, a base plate 23 fittedly joined to the air chamber 22 and having a plurality of vertically passed through holes 23a formed in the surface thereof, a filter 24 covering the through holes 23a in the base plate 23, and a plurality of piece plates 25 covering the upper surface of the filter 24, joined to the corresponding portions on the upper surface of the base plate 23, having air discharge holes 25a vertically passed through the base plate 23 correspondingly to the through holes 23a in the base plate 23 formed in the surfaces thereof, and forming air layer relieving groove parts 25b along the vertical and lateral directions through separate clearances therebetween. COPYRIGHT: (C)2006,JPO&NCIPI
|
