| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate coater capable of improving production efficiency and cost, and coating a substrate with a coating solution without leaving deposits in a coating unnecessary region of the substrate. SOLUTION: Nozzles 521 to 523 discharge the coating solution from their tips. A stage 21 places the substrate P on its installation face. A relative moving mechanism relatively moves the nozzles 521 to 523 and the stage 21 in a Y-axis direction. A nozzle moving mechanism 51 moves the nozzles 521 to 523 back and forth in an X-axis direction in the space above the stage 21. A wiping off member 552 wipes off the coating solution applied on the substrate P by abutting on the substrate P. The wiping off member support part supports the wiping off member 552 by causing the wiping off member 552 to abut on a part of the region where the substrate P placed on the stage 21 is coated with the coating solution. COPYRIGHT: (C)2006,JPO&NCIPI
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