OXIDE TRANSPARENT ELECTROCONDUCTIVE FILM AND METHOD FOR FORMING OXIDE TRANSPARENT ELECTROCONDUCTIVE FILM CONTAINING ALKALI METAL, AND ORGANIC OPTICAL DEVICE UTILIZING THE OXIDE TRANSPARENT ELECTROCONDUCTIVE FILM

摘要

Provided are an oxide transparent electroconductive film which can retain a work function value of less than 4.5 eV in the atmosphere with stability; and a method for forming the above film. An alkali metal selected from among cesium, lithium, sodium, potassium and rubidium is incorporated into an oxide transparent electroconductive film comprising an oxide such as indium tin oxide. A plasma gas such as argon is allowed to flow into a sputtering chamber (11) from a bomb (18), and a material for an oxide transparent electroconductive film is sputtered from a target (12) arranged in the sputtering chamber (11) onto a glass substrate (15). The central position (P) of the glass substrate (15) is arranged at a position being deviated from the central position (Q) of the target (12). When the material for an oxide transparent electroconductive film is sputtered from a target (12) arranged in the sputtering chamber (11) onto the glass substrate (15), a cesium vapor is introduced to the space in the sputtering chamber (11) from the center of a plasma space to the glass substrate (15) by a cesium vaporization source (21).