| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aligner in which light transmittance distribution of a light illuminance distribution correction filter can be updated inexpensively and quickly. <P>SOLUTION: The aligner comprises a light source 1, a section 28 for holding a reticle being irradiated with light from the light source 1, a fly eye lens 22 having a plurality of lens elements 22a and arranged between the reticle holding section 28 and the light source 1, an illuminance distribution correction filter 30 having a plurality of liquid crystal cells arranged in matrix and interposed between the light source 1 and the fly eye lens 22 in order to correct illuminance distribution of light for the plurality of lens elements 22a, and a section 50 for controlling the plurality of liquid crystal cells respectively. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
