| 摘要 |
PROBLEM TO BE SOLVED: To enable automatic discrimination of a temperature adjustment target and elimination of a set error for a target flow. SOLUTION: Of a characteristic (a) of a process chamber 21a having a large pressure loss and a characteristic (b) of a process chamber 21b having a small pressure loss, a threshold A (flow value Q3, pressure value P3) is set on the characteristic (a). The threshold A is set in a controller 9. When the amount of flow passed through pipe lines 1, 2 and a passage of the process chamber 21 is increased, the flow amount is measured by a flow meter 4, and the pressure of the flow is measured by a pressure switch 5. When the pressure reaches the value P3 upon arrival of the flow amount at the value Q3, the pressure switch 5 is actuated. In this case, the controller 9 determines that the process chamber 21a having the large pressure loss is connected to the pipe lines 1, 2. When the pressure fails to reach the value P3, the controller 9 determines that the process chamber 21b having the small pressure loss is connected to the pipe lines 1, 2. COPYRIGHT: (C)2006,JPO&NCIPI
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