| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrical characteristics measuring device of a wafer where a ferroelectric material which precisely measures the electrical characteristics in a state of the wafer is formed, by solving the problem wherein the electrical characteristics as the state of the wafer cannot be measured precisely on the ferroelectric material used for tuning fork for sensor. SOLUTION: The device is provided with a table 6 on which the wafer 5 where the ferroelectric material is formed on a silicon substrate is placed, a plurality of pins 7 disposed on the table 6 so that they energize and hold a ferroelectric material non-forming part at the surface peripheral edge of the wafer 5 and a measuring part for applying voltage to the wafer 5 and measuring the electrical characteristics. Since external force will not be added to the ferroelectric material formed on the surface of the wafer 5, the ferroelectric material can be expanded and contracted freely, and the electrical characteristics of the ferroelectric material can be measured accurately, without partially destroying the polarization state. COPYRIGHT: (C)2006,JPO&NCIPI
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