发明名称 CHAMBER CONNECTING APPARATUS
摘要 PROBLEM TO BE SOLVED: To easily connect chambers in a chamber connecting apparatus for connecting the chambers. SOLUTION: In the chamber connecting apparatus 1 for connecting a first chamber 5 to a second chamber 9, annular elastic members 15, 17 that are installed so that the opening of at least one chamber 5, 9 of respective chambers 5, 9 is surrounded, and a cylindrical connecting member 19 that comes into contact with the outer periphery or inner periphery of the elastic members 15, 17 is used, thus connecting the first chamber 5 to the second chamber 9. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006210370(A) 申请公布日期 2006.08.10
申请号 JP20050016285 申请日期 2005.01.25
申请人 ISHIKAWAJIMA HARIMA HEAVY IND CO LTD 发明人 HASEGAWA KOZO;MURAKAMI HIROKI;OSAWA NORIYOSHI;KANESHIMA YOSHIHARU;SUGAWARA HIDEO;KARASAWA YASUTO
分类号 H01L21/677 主分类号 H01L21/677
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