发明名称 LINEAR MOTOR, MANUFACTURING METHOD THEREOF, AND STAGE DEVICE USING THE LINEAR MOTOR
摘要 PROBLEM TO BE SOLVED: To enhance cooling efficiency of a coil. SOLUTION: In a coil part 60, two lines of coils 66 are integrated with a mold (resin material) 76, which is covered with a cover member 78. A glass film 80 is formed on the surface of the mold 76. The glass film 80 comprises organic material to have insulating property, which prevents penetration of water. A cooling water channel 74 in which a cooling water flows is formed in the gap between the inner wall of cover member 78 and the surface of glass film 80. The glass film 80 formed in constant thickness (several microns) with coating is a liquid glass. Since the entire surface of the coil 66 is covered with the glass film 80, the cooling water that flows the cooling water channel 74 is prevented from penetrating into the coil 66 side. Thus, the occurrence of dielectric breakdown or cracking caused by the cooling water is prevented, to prevent dissolving of metal ion or insulating material on the surface of coil. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006211817(A) 申请公布日期 2006.08.10
申请号 JP20050020217 申请日期 2005.01.27
申请人 SUMITOMO HEAVY IND LTD 发明人 SHINOHIRA DAISUKE;USUI MICHITARO
分类号 H02K41/02;H02K9/19;H02K41/03 主分类号 H02K41/02
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