| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor sensor system for attaining high reliability using a simple constitution, and to prove its manufacturing method realizing simplification in manufacturing and a correction method. SOLUTION: In the semiconductor sensor system for measuring the variations in the electrical characteristics of physical quantity in observing part with a conversion part, and provided with a compensation part for calibrating the output signal of the conversion part, the conversion part and a discrimination information generation circuit are loaded on the first semiconductor integrated circuit, and the compensation part and a non-volatile memory are loaded on the second semiconductor integrated circuit. In the non-volatile memory of the second semiconductor integrated circuit combined with the first semiconductor integrated circuit, the calibration information, corresponding to the non-volatile memory of the first semiconductor integrated circuit, is stored by using discrimination information formed in the discrimination information generation circuit of the first semiconductor integrated circuit and calibration information acquired from inspection results of the output signal of the conversion part. COPYRIGHT: (C)2006,JPO&NCIPI
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