| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement detecting device for a magnetic bearing device with an axial displacement sensor unit simply constructed to require a less number of components and easily manufactured to reduce cost for accurately detecting the axial displacement of a rotor. SOLUTION: The displacement detecting device comprises two sets of radial displacement sensor units 6, 7 each of which has four radial displacement sensors 16a, 16b, 18a, 18b arranged at equal peripheral spaces so as to be opposed to target portions 15, 17 on the outer periphery of the rotor 1 and one set of axial displacement unit 8 which has a pair of axial displacement sensors 19a, 19b arranged at an axial space so as to be opposed to both axial edges of the target portion 17 on the outer periphery of the rotor 1. A displacement computing means computes the radial displacement of the rotor 1 with the output of the radial displacement sensors and computes the axial displacement of the rotor 1 by correcting a value computed with the output of the axial displacement sensors in accordance with the output of the radial displacement sensors. COPYRIGHT: (C)2006,JPO&NCIPI
|
