| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a simple and highly productive method for manufacturing a strong substrate coated with a silicon oxide membrane, which has high wear resistance and transparency and which can be converted into a thick membrane. <P>SOLUTION: The silicon oxide membrane is produced on the substrate by applying on the surface of the substrate a process liquid which contains an organosilicon compound having a polysilsesquioxane structure and a hydroxy group at the terminal, a resin having a heat decomposition temperature of 300-550°C and an organic solvent at the weight ratio (M/N) of the organosilicon compound (M) to the resin (N) of 1-25, and then drying the process liquid at 50-200°C so as to remove the organic solvent, and thereafter firing the processed substrate at 500-800°C. The resin having a heat decomposition temperature of 300-550°C can be specifically ethyl cellulose. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
