| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a quartz glass crucible having excellent mechanical strength in use at a high temperature of silicon single crystal pulling, hardly causing occurrence of dislocation at the initial stage of pulling and having a high single crystallization ratio and to provide its manufacturing method. <P>SOLUTION: In the method for manufacturing the quartz glass crucible by a rotary mold method, the silica powder containing a crystallizing agent is used, and a crystallization promoting agent is moved to the crucible inner surface by applying a voltage between an arc electrode and a mold in a process for arc-melting the silica powder, and also the crucible is held at 1,200-1,600°C for 10 minutes or longer, and the quartz glass crucible wherein the crucible inner surface having a thickness of 1-10μm contains the crystallization promoting agent and the crucible inner surface is a semicrystalline layer having a crystallinity of 80-95%. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
