| 摘要 |
PROBLEM TO BE SOLVED: To uniformly and precisely form a liquid repellent film around nozzles. SOLUTION: A method for manufacturing a nozzle plate is characterized by including the steps of: pasting a protective sheet on a nozzle plate where nozzles are formed; forming holes penetrating the nozzle plate from the rear surface side of the side on which the protective sheet is pasted in the nozzle plate and having their bottoms inside the protective sheet; filling the holes with a filler material from the rear surface side; peeling off the protective sheet; forming a liquid repellent film on the nozzle plate surface after the protective sheet is peeled off; and removing the filler material. COPYRIGHT: (C)2006,JPO&NCIPI
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