| 摘要 |
A temperature measuring method has the steps of (a) coating a mixture of fluorescent dye on a surface of the micro device, (b) heating the micro device with a calibration heater, (c) acquiring an emission intensity image of the mixture with a camera by illuminating the surface of the micro device with a light, (d) averaging the emission intensity image by units of a plurality of pixels, (e) calculating a temperature calibration curve indicating a change of the emission intensity with respect to the temperature, from the image averaged by units of a plurality of pixels, and (f) removing the calibration heater, acquiring an emission intensity image by actually driving the micro device, and converting the acquired emission intensity image into a temperature, using the temperature calibration curve. According to the method, the temperature calibration curve is obtained through the averaged emission intensity image, and a temperature field on the micro device is measured using the temperature calibration curve. Thus, the emission intensity of fluorescent dye can correct a deviation occurring between each pixel of the image, thereby making it possible to precisely measure the temperature field in microscale.
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