| 摘要 |
In a ferroelectric capacitor structure 30 in which a lower electrode and an upper electrode are coupled capacitively with each other through a ferroelectric film, when the upper electrode is formed into a two-layer structure in which a conductive oxide film and an oxidation-resistant metal film are stacked, a protective film is formed on the oxidation-resistant metal film, and the upper electrode of which upper surface alone is covered with the protective film is pattern formed.
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