Device for controlling temperature of substrates has second partial element having second connecting surface, over which it partially lies against first connecting surface of first partial element

摘要

The device has a first partial element (10) having a contact surface (20), against which the substrate (S) lies. Second partial element (12) has a second connecting surface (28), over which it partially lies against the first connecting surface (22) of the first partial element whereby at least one of the two partial elements has ceramic material. A recess (24,30) is provided in at least one of the two connecting surfaces, which defines an opening in the device. A first connection opening is provided, through which the tempered fluid is discharged from the opening.