FLUID SENSING DEVICE WITH INTEGRATED BYPASS AND PROCESS THEREFOR

摘要

A micromachined fluid sensing device and a method for its fabrication. The sensing device incorporates a bypass passage, preferably an integral bypass passage within the device, that enables a volume of fluid to be delivered to the device, with a limited portion of the fluid passing through a passage within the device in which one or more properties of the fluid are sensed, such as but not limited to density, specific gravity, and chemical concentrations. The device is suitable for monitoring the fuel concentration in a fuel mixture for a fuel cell.