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发明名称
A METHOD OF MANAGING PROCESS DATA
摘要
申请公布号
KR20060089925(A)
申请公布日期
2006.08.10
申请号
KR20050010040
申请日期
2005.02.03
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
CHO, WOO HYEON
分类号
H01L21/027;H01L21/00
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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