| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow sensor that copes with almost all of corrosive fluids with an improved responsiveness and sensitivity. <P>SOLUTION: This flow sensor 1 comprises: a base plate 4 with a surface 4a side facing a passage 3 for a fluid to be measured 2; and a passage forming member 5 and a plate 6 arranged pinching base plate 4 in between. The base plate 4 is formed of a stainless steel plate about 50 to 150μm in thickness, and an electric insulating film is formed on the surface 4b opposite to the passage 3 side. A temperature detecting means 7 for measuring the flow velocity (flow rate) of the fluid 2, a surrounding temperature sensor 8, an electrode pad 9 and a wiring metal thin film 10 are formed thereon. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
