| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus which transfers wafers efficiently in a simple process. SOLUTION: The apparatus comprises a first bearing stand 1 on which a feeding carrier 12 having a plurality of wafer storage slots is placed; a second bearing stand 2 on which a receiving carrier 13 having the same shape as the feeding carrier 12 is placed to be counter to the feeding carrier 12, and which is formed to be higher than the first bearing stand 1 and lower than the upper face of the feeding carrier 12; and a push-out means 3 which pushes out a plurality of wafers W out of wafers W stored in the feeding carrier 12 placed on the first bearing stand 1, toward the receiving carrier 13 placed on the second bearing stand 2 to transfer the pushed out wafers W to the receiving carrier 13. COPYRIGHT: (C)2006,JPO&NCIPI |
