| 摘要 |
PROBLEM TO BE SOLVED: To prevent that a member arranged inside a lens barrel is charged or polluted, and the deterioration of a drawing performance is minimized. SOLUTION: A charged beam source, blanking electrodes 17a and 17b which deflect the charged beam, and a blanking aperture 18 which covers the particle beam deflected by this blanking electrode, are used. It has a conductive module for absorbing reflective electrically charged particle 16 or generated electrically charged particle 16 by this blanking aperture 18. The above conductive module is arranged rather than the blanking aperture 18 at the side of the charged beam source, and a voltage of reverse polarity to the charged beam is applied. COPYRIGHT: (C)2006,JPO&NCIPI
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