| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect detection method for matrix structure and defect detection device of matrix structure which make it possible to easily detect point-like defects in matrix structure. SOLUTION: The defect detection method of matrix structure 100 which has structure of grid-like crossing a plurality of gate lines 4a, 4b, 4c and 4d arranged in X-axis direction and a plurality of data lines 3a and 3b arranged in Y-axis direction, which detects point-like defects 11 as linear defects. COPYRIGHT: (C)2006,JPO&NCIPI
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