| 摘要 |
<p>The present invention is directed towards a method of separating a mold, included in a template, from a layer disposed on a substrate, the method including, inter alia, applying a separation force to the template to separate the template from the layer; and facilitating localized deformation in the substrate to reduce the separation force required to achieve separation.</p> |
| 申请人 |
MOLECULAR IMPRINTS, INC. |
发明人 |
CHOI, BYUNG-JIN;CHERALA, ANSHUMAN;CHOI, YEONG-JUN;MEISSL, MARIO, J.;SREENIVASAN, SIDLGATA, V.;SCHUMAKER, NORMAN, E.;LU, XIAOMING;MCMACKIN, IAN, M.;BABBS, DANIEL, A. |
