| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection device for precisely inspecting optical performance of a projection optical system used for liquid immersion exposure. <P>SOLUTION: The inspection device is provided with a liquid holding member 70 which is installed on an image face side of the projection optical system PL and has a peripheral wall 71 holding liquid LQ, a reflection spherical face 8S arranged inside the peripheral wall 71, a photodetector which photo-electrically detects measurement light reflected on the reflection spherical face 8S through liquid LQ supplied to an inner side of the peripheral wall 71 and the projection optical system PL, a movable member 94 which holds the reflection spherical face 8S and can move, and interferometers 11 and 12 detecting a position of the movable member 94 in cooperation with an interferometer reflection face disposed in the movable member 94. The liquid holding member 70 and the movable member 94 are separated. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
